Novel Deep UV Photoresist Based on Thermal Cross-Linking and De-Cross-Linking of Cross-Linkable Photoacid Generator.

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ژورنال

عنوان ژورنال: Journal of Photopolymer Science and Technology

سال: 1998

ISSN: 0914-9244,1349-6336

DOI: 10.2494/photopolymer.11.439